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EPI - AMAT


Part Number : 3700-01902 / 3700-01226

ORING ID 2.359 CSD .139 VITON (PLATENS) 60DURO....


EPI - AMAT


Part Number : 5070-01030

Grease Braycote 1613 (-73.3 to +204 deg, 2oz syringe)....


EPI - AMAT


Part Number : 0020-37321

Particle shield ring for rotation assy....


EPI - AMAT


Part Number : 0020-37026

Base Susceptor Lift Shaft (Teflon)....


EPI - AMAT


Part Number : 0020-37027

Space, Wafer Lift (Teflon)....